Quartz sleeve for fab IR lamp

Wed, 24 Jun 2026 04:33:07 +0800

On the fab floor, photoresist bake isn’t a recommendation—it’s a thermal commitment. A 0.5°C swing shifts critical dimension, and one particle from a sleeve can take out a die. Our quartz sleeve for fab IR lamps is built for that reality: it holds lamp output steady, keeps the chamber clean, and keeps the process in control. What matters, technically We spec high-purity quartz for stable transmission across short-wave and medium-wave IR, so the energy gets to the wafer without spectral loss. The sleeve geometry is tuned for wafer-level thermal uniformity, supporting ±0.1°C repeatability in soft bake and hard bake. It’s engineered for Class 1–100 cleanroom operation, with zero particle generation during thermal cycling. The interface matches standard lamp housings, preserving alignment and seal integrity. Here’s why it matters in lithography and photoresist processing: you need bake profiles that stay consistent across the lot, the shift, and the week. This sleeve keeps lamp output stable over 5,000+ hours, cutting output drift and protecting your thermal budget. That translates to fewer reworks, higher yields, and predictable CD control. It also trims energy waste by sustaining efficient heat transfer, and it cuts unplanned maintenance by running reliably, 24/7. A few practical notes. Quartz is tough, but it’s sensitive to mechanical shock and some cleaning chemistries. Handle with clean tools, avoid contact on the radiating surface, and confirm compatibility with your chamber cleaners and cool-down ramps. Installation has to preserve lamp alignment and thermal clearances. Even a small misalignment can create hot spots and degrade uniformity.

Sleeve on Master Infrared Heating Systems

Quartz sleeve for fab IR lamp